Nakajima Tsutomu | Microelectronics Research Laboratories Nec
スポンサーリンク
概要
関連著者
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Nakajima Tsutomu
Microelectronics Research Laboratories Nec
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Kunio Takemitsu
Microelectronics Research Laboratories Nec
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Hayashi Yoshihiro
Microelectronics Research Laboratories Nec
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林 喜宏
日本電気株式会社デバイスプラットフォーム研究所
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林 喜宏
日本電気株式会社マイクロエレクトロニクス研究所 超高集積回路研究部
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林 喜宏
日本電気(株)マイクロエレクトロ二クス研究所
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KUNIO Takemitsu
Microelectronics Research Laboratories, NEC Corporation
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Hayashi Y
Irie Koken Co. Ltd.
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Kunio T
Silicon Systems Research Laboratories Nec Corporation
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HAYASHI Yoshihiro
Microelectronics Research Laboratories, NEC
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NAKAJIMA Tsutomu
Microelectronics Research Laboratories, NEC
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Hayashi Yoshihiro
Microelectronics Research Laboratories Nec Corporation
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Hayashi Yoshihiro
Device Platforms Research Labs. Nec Corporation
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Hayashi Yoshihiro
Ulsi Res. Lab Silicon Systems Res. Labs. Nec
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Hayashi Yoshihiro
System Devices Research Laboratories, NEC Corporation, 1120 Shimokuzawa, Sagamihara, Kanagawa 229-1198, Japan
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Nakajima Tsutomu
Microelectronics Research Laboratories, NEC, 1120, Shimokuzawa, Sagamihara, Kanagawa 229, Japan
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Kunio Takemitsu
Microelectronics Research Laboratories, NEC, 1120, Shimokuzawa, Sagamihara, Kanagawa 229, Japan
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Hayashi Yoshihiro
System Devices Research Laboratories, NEC, 1120 Shimokuzawa, Sagamihara, Kanagawa 229-1198, Japan
著作論文
- Ultra-Uniform CMP Using a Hydro Film Buffered Chuck (Hydro Chuck)
- Ultrauniform Chemical Mechanical Polishing (CMP) Using a "Hydro Chuck", Featured by Wafer Mounting on a Quartz Glass Plate with Fully Flat, Water-Supported Surface