Lee G‐s | Nano Soi Process Laboratory Hanyang University

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• 同名の論文著者
• Nano Soi Process Laboratory Hanyang Universityの論文著者

Nano Soi Process Laboratory Hanyang University | 論文

• Dependency of Precipitation of Interstitial Oxygen on Its Crystal Nature in Czochralski Silicon Wafer
• Crystal Originated Particle Induced Isolation Failure in Czochralski Silicon Wafers
• Dependency of Precipitation of Interstitial Oxygen on Its Crystal Nature in Czochralski Silicon Wafer
• Effect of Nanotopography on Chemical Mechanical Polishing : Polishing Depth, Pad, Slurry and Interlayer Film Dependencies
• Effect of Nanotopography on Chemical Mechanical Polishing : Polishing Depth, Pad, Slurry and Interlayer Film Dependencies

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