MISINA Martin | Institute of Physics, Academy of Sciences of The Czech Republic
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概要
関連著者
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MISINA Martin
Institute of Physics, Academy of Sciences of The Czech Republic
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Misina Martin
Institute Of Physics Academy Of Sciences Of The Czech Republic
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MIYAKE Shoji
Osaka University
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MIYAKE Shoji
Joining and Welding Research Institute, Osaka University
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SETSUHARA Yuichi
Osaka University
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Miyake Shoji
Joining & Welding Resarch Institute Osaka University
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Shoyama Hiroaki
Joining And Welding Research Institute Osaka University
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Misina M
Osaka Univ. Osaka Jpn
著作論文
- Characteristics of an ECR Plasma Sputtering Source at Low Ar/N_2 Gas Pressures for Thin Film Synthesis
- Effect of Magnetic Mirror Plasma Confinement on Microwave Electron Cyclotron Resonance/D.C. Discharge for Low Pressure Sputtering(Physics, Process, Instrument & Measurements)