YAMAGUCHI Takatomo | Hitachi Kokusai Electric INC.
スポンサーリンク
概要
関連著者
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CHIKAHISA Takemi
Div. of Mech. Sci., Hokkaido Univ.
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HISHINUMA Yukio
Div. of Mech. Sci., Hokkaido Univ.
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YAMAGUCHI Takatomo
Hitachi Kokusai Electric INC.
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Saito Naoko
Division Of Mechanical Science Hokkaido University
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Sasaki Takafumi
Div. Of Mech. Sci. Hokkaido Univ.
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KIKUTA Kazushige
Div. of Mech. Sci., Hokkaido Univ.
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MIYATA Toshimitsu
Hitachi Kokusai Electric INC.
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Saito Naoko
Division Of Blood Transfusion Tohoku University Hospital
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MORIMITSU Kazuhiro
Hitachi Kokusai Electric INC.
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KIKUTA Kazushige
Division of Mechanical Science, Hokkaido University
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SAITO Naoko
Div. of Mech. Sci., Hokkaido Univ.
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SASAKI Takafumi
Division of Mechanical Science, Hokkaido University
著作論文
- A16-086 ANALYSIS OF GAS FLOWS ON SILICON-WAFER SURFACE IN LOW PRESSURE CVD REACTOR
- TED-AJ03-372 ANALYSIS OF THE REACTANT GAS FLOW AND TEMPERATURE DISTRIBUTION ON SILICON WAFER SURFACES ARRANGED IN A ROW IN HEATING FURNACE
- TED-AJ03-371 HEATING CHARACTERISTICS OF SILICON WAFERS ARRANGED IN A ROW IN A HEATING FURNACE