Nakano Yoshitaka | Chubu Univ. Aichi Jpn

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概要

関連著者

Nakano Yoshitaka
Chubu Univ. Aichi Jpn
Mukai Takashi
Nichia Chemical Industries Inc.
Niibe Masahito
Laboratory of Advanced Science &Technology for Industry, Himeji Institute of Technology
Tominaga Kikuo
Institute of Socio-Techno Science Technology, The University of Tokushima, 2-1 Minami-Josanjima, Tokushima 770-8506, Japan
Takeichi Atsushi
Institute of Socio-Techno Science Technology, The University of Tokushima, 2-1 Minami-Josanjima, Tokushima 770-8506, Japan
Mori Yuta
Institute of Socio-Techno Science Technology, The University of Tokushima, Tokushima 770-8506, Japan
Konishi Masashi
Institute of Socio-Techno Science Technology, The University of Tokushima, Tokushima 770-8506, Japan
Kawakami Retsuo
Institute of Socio-Techno Science Technology, The University of Tokushima, 2-1 Minami-Josanjima, Tokushima 770-8506, Japan

著作論文

Comparison between Damage Characteristics of p- and n-GaN Surfaces Etched by Capacitively Coupled Radio Frequency Argon Plasmas (Special Issue : Dry Process)

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