AUBERTON-HERVE Andre-Jacques | LETI
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概要
関連著者
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Bruel Michel
Leti-dmitec-cea
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AUBERTON-HERVE Andre-Jacques
LETI
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ASPAR Bernard
G-I7
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ASPAR Bernard
CEA Departement de Microtechnologies
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BRUEL MICHEL
LETI/CEA Department de Microtechnologies
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ASPAR Bernard
LETI/CEA Department de Microtechnologies
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AUBERTON-HERVE Andre-Jacques
SOITEC
著作論文
- Smart-Cut: A New Silicon On Insulator Material Technology Based on Hydrogen Implantation and Wafer Bonding
- Smart-Cut : A New S.O.I. Material Technology Based on Hydrogen Implantation and Wafer Bonding