Bruel Michel | Leti-dmitec-cea
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概要
関連著者
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Bruel Michel
Leti-dmitec-cea
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ASPAR Bernard
G-I7
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AUBERTON-HERVE Andre-Jacques
LETI
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ASPAR Bernard
CEA Departement de Microtechnologies
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AUBERTON-HERVE A.
SOITEC SA
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MALEVILLE Christophe
LETI-DMITEC-CEA
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MORICEAU Hubert
G-I7
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BRUEL MICHEL
LETI/CEA Department de Microtechnologies
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ASPAR Bernard
LETI/CEA Department de Microtechnologies
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AUBERTON-HERVE Andre-Jacques
SOITEC
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ASPAR Bernard
LETI-DMITEC-CEA/G-I7
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MORICEAU Hubert
LETI-DMITEC-CEA/G-17
著作論文
- Smart-Cut: A New Silicon On Insulator Material Technology Based on Hydrogen Implantation and Wafer Bonding
- SMART-CUT^[○!R] : The Basic Fabrication Process for UNIBOND^[○!R] SOI Wafers (Special Issue on SOI Devices and Their Process Technologies)
- Smart-Cut : A New S.O.I. Material Technology Based on Hydrogen Implantation and Wafer Bonding