SOROOSHIAN J. | Department of Chemical and Environmental Engineering, University of Arizona
スポンサーリンク
概要
関連著者
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Beaudoin S.
Department De Chirurgie Pediatrique Hopital Saint-vincent De Paul
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SOROOSHIAN J.
Department of Chemical and Environmental Engineering, University of Arizona
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GOLDSTEIN M.
Intel Corporation
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HUBER W.
Sumitomo Mitsubishi Silicon Group
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Beaudoin S.
Department Of Chemical And Materials Engineering Arizona State University
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PHILIPOSSIAN A.
Department of Chemical and Environmental Engineering, University of Arizona
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Philipossian A.
Department Of Chemical And Environmental Engineering University Of Arizona
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Sorooshian J.
Department of Chemical and Environmental Engineering, University of Arizona, Tucson, Arizona 85721, USA
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Goldstein M.
Intel Corporation, Santa Clara, California 95052, USA
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Philipossian A.
Department of Chemical and Environmental Engineering, University of Arizona, Tucson, Arizona 85721, USA
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Beaudoin S.
Department of Chemical and Materials Engineering, Arizona State University, Tempe, Arizona 85287, USA
著作論文
- Impact of Wafer Geometry and Thermal History on Pressure and von Mises Stress Non-Uniformity During Chemical Mechanical Planarization
- Impact of Wafer Geometry and Thermal History on Pressure and von Mises Stress Non-Uniformity During Chemical Mechanical Planarization