PHILIPOSSIAN A. | Department of Chemical and Environmental Engineering, University of Arizona

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概要

• 同名の論文著者
• Department of Chemical and Environmental Engineering, University of Arizonaの論文著者

関連著者

• Beaudoin S.

  Department De Chirurgie Pediatrique Hopital Saint-vincent De Paul

• Beaudoin S.

  Department Of Chemical And Materials Engineering Arizona State University

• SOROOSHIAN J.

  Department of Chemical and Environmental Engineering, University of Arizona

• PHILIPOSSIAN A.

  Department of Chemical and Environmental Engineering, University of Arizona

• GOLDSTEIN M.

  Intel Corporation

• HUBER W.

  Sumitomo Mitsubishi Silicon Group

著作論文

• Impact of Wafer Geometry and Thermal History on Pressure and von Mises Stress Non-Uniformity During Chemical Mechanical Planarization

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