ARAI Kohichi | System Devices Research Laboratories, NEC Corporation
スポンサーリンク
概要
関連著者
-
Ochiai Yukinori
System Devices And Fundamental Research Nec Corporation
-
Arai K
Electrotechnical Laboratory
-
NARIHIRO Mitsuru
System Devices Research Laboratories, NEC Corporation
-
ARAI Kohichi
System Devices Research Laboratories, NEC Corporation
-
Narihiro Mitsuru
System Devices And Fundamental Research Nec Corporation
-
OGURA Takashi
System Devices Research Laboratories, NEC Corporation
-
Ueki Makoto
System Devices And Fundamental Research Nec Corporation
-
Mogami Tohru
System Devices And Fundamental Research Nec Corporation
-
Ishida Masahiko
Fundamental And Environmental Research Laboratories Nec Corporation
-
NATSUKA Yasutaka
Tsukuba Laboratory, Tokuyama Corporation
-
Natsuka Yasutaka
Tsukuba Laboratory Tokuyama Corporation
-
WAKABAYASHI Hitoshi
System Devices and Fundamental Research, NEC Corporation
-
Wakabayashi Hitoshi
System Devices And Fundamental Research Nec Corporation
-
Ogura Takashi
System Devices And Fundamental Research Nec Corporation
著作論文
- 10-nm-Scale Pattern Delineation Using Calixarene Electron Beam Resist for Complementary Metal Oxide Semiconductor Gate Etching
- Intra-Leve Mix-and-Match Lithography Process for Fabricating Sub-100-nm Complementary Metal-Oxide-Semiconductor Devices using the JBX-9300FS Point-Electron-Beam System