Ikuta Kenji | Atsugi Laboratories Ntt Electrical Communication Laboratories
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概要
関連著者
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Ikuta Kenji
Atsugi Laboratories Ntt Electrical Communication Laboratories
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Ikuta Kenji
Atsugi Electrical Communication Laboratory Nippon Telegraph And Telephone Public Corporation
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Ozaki Yoshiharu
Atsugi Electrical Communication Laboratory Nippon Telegraph And Telephone Public Corporation
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Ohara Takahiko
Atsugi Electrical Communication Laboratory, Nippon Telegraph and Telephone Public Corporation
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Ohara Takahiko
Atsugi Electrical Communication Laboratory Nippon Telegraph And Telephone Public Corporation
著作論文
- MOS C-t Evaluation of Reactive Ion Etched Silicon Substrate
- Intrinsic Gettering of RIE Damage on Silicon Studied by Scanning DLTS and EBIC Methods
- Lifetime Evaluation of Denuded Zone Quality and Intrinsic Gettering Effect on Heavy Metals