Yeom Geun-young | Department Of Materials Science And Engineering Sung Kyun Kwan University
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概要
Department Of Materials Science And Engineering Sung Kyun Kwan University | 論文
- High-Rate Dry Etching of ZnO in BCl_3/CH_4/H_2 Plasmas
- High-Rate Dry Etching of ZnO in BCl3/CH4/H2 Plasmas
- The Effect of N_2 Flow Rate in He/O_2/N_2 on the Characteristics of Large Area Pin-to-Plate Dielectric Barrier Discharge
- The Effect of N2 Flow Rate in He/O2/N2 on the Characteristics of Large Area Pin-to-Plate Dielectric Barrier Discharge
- Fabrication and Sensing Behavior of Piezoelectric Microcantilever for Nanobalance