Paek S‐h | Department Of Materials Engineering Hanyang University
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概要
Department Of Materials Engineering Hanyang University | 論文
- Electrical and Microstructural Degradation with Decreasing Thickness of (Ba, Sr)TiO_3 Thin Films Deposited by RF Magnetron Sputtering
- Hydrogenation of Polysilicon Thin Film Transistors Using Inductively Coupled Plasma
- Application of Electron Cyclotron Resonance Plasma Thermal Oxidation to Bottom Gate Polysilicon Thin Film Transistors
- Suppression of Leakage Current in n-Channel Polysilicon Thin-Film Transistors Using NH_3 Annealing
- Remote Plasma-Assisted Metal Organic Chemical Vapor Deposition of Tantalum Nitride Thin Films with Different Radicals