Sakamoto Akihiro | Process Technology Center Oki Electric Industry Co. Ltd.

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概要

• 同名の論文著者
• Process Technology Center Oki Electric Industry Co. Ltd.の論文著者

関連著者

• Tamura H

  R&d Center Kasado Administrative Division Power & Industrial Systems Hitachi Ltd.

• Chen S‐c

  National Taiwan Normal Univ. Taipei Twn

• Chen Shih-chang

  Vlsi R&d Center Oki Electric Industry Co. Ltd.

• TAMURA Hiroyuki

  VLSI R&D Center, Oki Electric Industry Co. Ltd.

• Sakamoto Akihiro

  Process Technology Center Oki Electric Industry Co. Ltd.

• YOSHIMARU Masaki

  VLSI R&D Center, OKI Electric Industry Co., Ltd.

• INO Masayoshi

  VLSI R&D Center, OKI Electric Industry Co., Ltd.

• Ino Masayoshi

  Oki Electric Industry Co. Ltd. Vlsi Rampd Center

• Ino Masayoshi

  Vlsi R&ampd Center Oki Electric Industry Co. Ltd.

• Tamura H

  Department Of Computer Science And Electronics Kyushu Institute Of Technology

• Tamura Hitomi

  Network Design Research Center Kyushu Institute Of Technology

• Tamura Hitoshi

  Mechanical Engineering Research Laboratory Hitachi Ltd.

• Yoshimaru Masaki

  Vlsi R&d Center Oki Electric Industry Co. Ltd.

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著作論文

• Applicability of TiN Adhesion Layer Formed by Nitridation of Sputtered Ti Film to Blanket CVD-W Contact Filling

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