Katsumata Hiroshi | Corporate Manufacturing And Engineering Center Toshiba Corp.

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概要

• 同名の論文著者
• Corporate Manufacturing And Engineering Center Toshiba Corp.の論文著者

関連著者

• Katsumata Hiroshi

  Corporate Manufacturing And Engineering Center Toshiba Corp.

• Uekusa Shin-ichiro

  Department Of Electrical And Electronic Engineering Meiji University

• Aoki K

  Texas Instruments Japan Ltd. Ibaraki Jpn

• UEKUSA Shin-ichiro

  Department of Electronics and Communication, School of Science and Technology, Meiji University

• Katsumata Hiroshi

  Corporate Manufacturing Engineering Center Toshiba Corporation

• Katsumata Hiroshi

  Electrotechnical Laboratory:meiji University

• Uekusa Shin-ichiro

  Department Of Electrical Engineering School Of Science And Technology Meiji University

• Uekusa Shin-ichiro

  School Of Engineering Meiji University

• Aoki K

  Toshiba Corp. Yokohama Jpn

• Uekusa S

  Meiji Univ. Kawasaki Jpn

• YAMAUCHI Takeshi

  Corporate Manufacturing Engineering Center, TOSHIBA Corporation

• Yamauchi Takeshi

  Corporate Manufacturing Engineering Center Toshiba Corporation

• AOKI Katsuaki

  Corporate Manufacturing Engineering Center, Toshiba Corporation

• AOKI Katsuaki

  Department of Electrical Engineering School of Science and Technology, Meiji University

• Aoki Katsuaki

  Corporate Manufacturing Engineering Center Toshiba Corporation

• MIYASHITA Naoto

  Department of Electrical and Electronic Engineering, Meiji University

• Miyashita Naoto

  Department of Electrical and Electronic Engineering, Meiji University, Tama-ku, Kawasaki 214-8571, Japan

• Matsui Yoshitaka

  Semiconductor Company, Toshiba Corp., 8, Shinsugita-cho, Isogo-ku, Yokohama 235-8522, Japan

• Kodera Masako

  Department of Electrical and Electronic Engineering, Meiji University, Tama-ku, Kawasaki 214-8571, Japan

• Katsumata Hiroshi

  Corporate Manufacturing and Engineering Center, Toshiba Corp., 33, Shinisogo-cho, Isogo-ku, Yokohama 235-0017, Japan

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著作論文

• Oxygen Plasma Damage in GaAs Directly Exposed to Surface-Wave Plasma
• Evaluation of Oxygen-Plasma Damage in GaAs Exposed to a Surface-Wave Plasma Source Developed for the Ashing Process : Nuclear Science, Plasmas, and Electric Discharges
• Development of Dishing-less Slurry for Polysilicon Chemical-Mechanical Polishing Process

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