Fukasawa Takayuki | School Of Engineering The University Of Tokyo
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概要
関連著者
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Fukasawa Takayuki
School Of Engineering The University Of Tokyo
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HORIIKE Yasuhiro
School of Engineering, The University of Tokyo
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Horiike Yasuhiro
Department Of Materials Engineering School Of Engineering The University Of Tokyo
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Horiike Yasuhiro
Department Of Materials Science University Of Tokyo
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Horiike Yasuhiro
Department Of Electrical Engineering Toyo University
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堀池 靖浩
広島大工
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堀池 靖浩
物質・材料研究機構
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Fukasawa Takayuki
School of Engineering, The University of Tokyo, 7-3-1 Hongo Bunkyo-ku, Tokyo 113-8656, Japan
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Fukasawa Takayuki
School of Engineering, The University of Tokyo, 7-3-1 Hongo, Bunkyo-ku, Tokyo 113-8656, Japan
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Horiike Yasuhiro
School of Engineering, The University of Tokyo, 7-3-1 Hongo Bunkyo-ku, Tokyo 113-8656, Japan
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Horiike Yasuhiro
School of Engineering, The University of Tokyo, 7-3-1 Hongo, Bunkyo-ku, Tokyo 113-8656, Japan
著作論文
- Anisotropic Etching of SiO_2 Film and Quartz Plate Employing Anhydrous HF
- Deep Dry Etching of Quartz Plate Over 100 μm in Depth Employing Ultra-Thick Photoresist (SU-8)
- Anisotropic Etching of SiO2 Film and Quartz Plate Employing Anhydrous HF
- Deep Dry Etching of Quartz Plate Over 100 μm in Depth Employing Ultra-Thick Photoresist (SU-8)