Nomura Takanori | Department Of Opto-mechatronics Faculty Of Systems Engineering Wakayama University
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Department Of Opto-mechatronics Faculty Of Systems Engineering Wakayama University | 論文
- Development of Accurate Shape Measurement System Using Multiple Reference Planes(Optical Method 2)
- Real-Time Measurement of Nanometer Displacement Distribution by Integrated Phase-Shifting Method(Experimental Mechanics)
- Synthesis of Polytetrafluoroethylene-like Films by a Novel Plasma Enhanced Chemical Vapor Deposition Employing Solid Material Evaporation Technique
- Simultaneous Measurement of Surface Profile and Ultrasonic Transmission Profile by Ultrasonically Vibrated Diamond Tip
- Low-Coherence Interferometry-Based Non-Contact Temperature Monitoring of a Silicon Water and Chamber Parts during Plasma Etching