Yamazaki Takashi | Toshiba Research and Development Center

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概要

• 同名の論文著者
• Toshiba Research and Development Centerの論文著者

関連著者

• HORIIKE Yasuhiro

  Toshiba Research and Development Center

• Yamazaki Takashi

  Toshiba Research and Development Center

• Okano Haruo

  Toshiba Research and Development Center

• Tokura Tsunemasa

  Tokuda Seisakusho

• HORIE Hiromichi

  Toshiba Research and Development Center

• Horiike Yasuhiro

  Toshiba Research And Development Center Integrated Circuit Laboratory

• Shibagaki Masahiro

  Toshiba Research And Development Center Integrated Circuit Laboratory

• Yamazaki Takashi

  Toshiba Research And Development Center Integrated Circuit Laboratory

• KURISAKI Tetsuo

  Tokuda Seisakusho Co.

著作論文

• Etching Characteristics of n^+ Poly-Si and Al Employing a Magnetron Plasma
• High-Rate Reactive Ion Etching of SiO_2 Using a Magnetron Discharge
• Aluminum Reactive Ion Etching Employing CCl_4+Cl_2 Mixture

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