Lee C | Semiconductor Technology Division Electronics And Telecommunications Research Institute
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- 同名の論文著者
- Semiconductor Technology Division Electronics And Telecommunications Research Instituteの論文著者
Semiconductor Technology Division Electronics And Telecommunications Research Institute | 論文
- Characteristics of SiOF Films Formed by Remote Plasma Enhanced Chemical Vapor Deposition with SF_6 Gas
- Fluoridation of GaAs Surface in a Remote SF_6 Plasma
- Electron Beam Damage in the SiN Membrane of an X-Ray Lithography Mask
- Characterization and Removal of Trace Heavy Metal Contamination on Si-Surface Resulted from CHF_3/C_2F_6 Reactive Ion Etching
- Characteristics of MOCVD-Cu Films Using Direct Liquid Injection and the Effects of Post-annealing