Sato Nobuyasu | Faculty Of Education Iwate University
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概要
関連著者
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Sato Nobuyasu
Faculty Of Education Iwate University
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Shida Yutaka
Faculty Of Education Iwate University
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SATO Nobuyasu
Faculty of Education, Iwate University
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Shiratani Masaharu
Department Of Electoronics Kyushu University
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Watanabe Yukio
Department Of Electrical Engineering Sciences Faculty Of Engineering Sciences Kyushu University
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Watanabe Yukio
Department Of Electrical Engineering Faculty Of Engineering Kyushu University
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Shida Y
Faculty Of Education Iwate University
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Sato Nobuyasu
Faculty of Education, Iwate University, Morioka 020, Japan
著作論文
- Two Dimensional Fluid Model of RF Plasmas in SiH_4/Ar Mixtures
- Effect of Gas Flow on RF Plasmas
- Modeling of Particle Growth in RF Silane-Helium Plasma ( Plasma Processing)
- Two Dimensional Fluid Model of RF Plasmas in SiH4/Ar Mixtures