Two Dimensional Fluid Model of RF Plasmas in SiH_4/Ar Mixtures

スポンサーリンク

概要

• 論文の詳細を見る
• Publication Office, Japanese Journal of Applied Physics, Faculty of Science, University of Tokyoの論文
• 1997-07-01

著者

• Shida Yutaka

  Faculty Of Education Iwate University

• SATO Nobuyasu

  Faculty of Education, Iwate University

• Sato Nobuyasu

  Faculty Of Education Iwate University

関連論文

• Two Dimensional Fluid Model of RF Plasmas in SiH_4/Ar Mixtures
• Effect of Gas Flow on RF Plasmas
• Modeling of Particle Growth in RF Silane-Helium Plasma ( Plasma Processing)
• Two Dimensional Fluid Model of RF Plasmas in SiH4/Ar Mixtures

スポンサーリンク