HATA Mitsuhiro | Process Development Team, Semiconductor R&D Center, Samsung Electronics, Co., Ltd.
スポンサーリンク
概要
関連著者
-
Cho Han-ku
Process Development Team Semiconductor R&d Center Samsung Electronics
-
HATA Mitsuhiro
Process Development Team, Semiconductor R&D Center, Samsung Electronics, Co., Ltd.
-
WOO Sang-Gyoun
Process Development Team, Semiconductor R&D Center, Samsung Electronics, Co., Ltd.
-
Kim Sang
Process Development Team Semiconductor R&d Center Samsung Electronics Co. Ltd.
-
Ryu Byoung-il
Process Development Team Semiconductor R&d Center Samsung Electronics Co. Ltd.
-
HAN Woo-Sung
Process Development Team. Samsung Electronic Co., Ltd.
-
Moon Joo-tae
Process Development Team Semiconductor R&d Division Samsung Electronics Co. Ltd.
-
Moon Joo-tae
Process Development Team Memory Division Samsung Electronics Co. Ltd.
-
Cho Han-ku
Process Development Team Semiconductor R&d Center Samsung Electronics Co. Ltd.
-
KIM Hyun-Woo
Process Development Team, Semiconductor R&D Center, Samsung Electronics Co., Ltd.
著作論文
- Most Efficient Alternative Manner of Patterning sub-80nm Contact Holes and Trenches with 193nm Lithography
- Most Efficient Alternative Manner of Patterning sub-80 nm Contact Holes and Trenches with 193 nm Lithography