Quevedo-lopez M. | Texas Instruments
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概要
関連著者
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Quevedo-lopez M.
Texas Instruments
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KIRSCH P.
IBM Assignees
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Kirsch P.
Ibm
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KRISHNAN S.
SEMATECH
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Lee B.
Ibm Assignees
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Lee B.
Ibm
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JAMMY R.
IBM Assignees
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Jammy R.
Ibm
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KRUG C.
SEMATECH
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AGUIRRE F.
UT-Dallas Dept. Elect. Eng.
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WALLACE R.
UT-Dallas Dept. Elect. Eng.
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PETERSON J.
SEMATECH
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LI H.-J
Infineon
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KIM M.
University of Texas at Dallas
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HUFFMAN C.
Texas Instruments
著作論文
- Effect Of Starting Interface in Scalability/Device Performance of Ultra-Scaled ALD HfSiON/TiN Gate Stacks
- Plasma Nitridation of HfO_2 Enabling a 0.9nm EOT with High Mobility for a Gate First MOSFET