Okuma Shigeru | Department of Information Electronics, Nagoya University
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概要
Department of Information Electronics, Nagoya University | 論文
- High-Speed Demonstration of SFQ Circuit Based on Cell-Based Design Method
- Design and Demonstration of Pipelined Circuits Using SFQ Logic(Special Issue on Superconductive Electronics)
- Kinetics of CF_x (x = 1-3) Radicals and Electrons in RF CF_4-H_2, CHF_3-H_2 and CHF_3-O_2 Plasmas
- CF_3, CF_2 and CF Radical Measurements in RF CHF_3 Etching Plasma Using Infrared Diode Laser Absorption Spectroscopy ( Plasma Processing)
- Laser-Induced-Fluorescence Detection of SiH_2 Radicals in a Radio-Frequency Silane Plasma