大見 敏仁 | Tohoku University Dept. of Nanomechanics

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概要

• 同名の論文著者
• Tohoku University Dept. of Nanomechanicsの論文著者

Tohoku University Dept. of Nanomechanics | 論文

• Micro-Heater Array for Tunable Fiber-Bragg Grating
• Technique for Preparing Defect-free Spray Coated Resist Film on Three-Dimensional Micro-Electromechanical Systems
• Piezoresistive Rotation Angle Sensor Integrated in Micromirror
• Large Displacement Micro XY-Stage with Paired Moving Plates
• Performance of Tense Thin Film Torsion Bar for Large-Rotation and Low-Voltage Driving of Micromirror

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