スポンサーリンク
Tohoku University Dept. of Nanomechanics | 論文
- Micro-Heater Array for Tunable Fiber-Bragg Grating
- Piezoresistive Rotation Angle Sensor Integrated in Micromirror
- Technique for Preparing Defect-free Spray Coated Resist Film on Three-Dimensional Micro-Electromechanical Systems
- Performance of Tense Thin Film Torsion Bar for Large-Rotation and Low-Voltage Driving of Micromirror
- Large Displacement Micro XY-Stage with Paired Moving Plates