Hata Seiichi | Dept. of Micro-Nano Systems Engineering, Nagoya University
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概要
Dept. of Micro-Nano Systems Engineering, Nagoya University | 論文
- 特集論文 Anisotropy of Fracture Strength and Fracture Toughness of Micro-Sized Single-Crystal Silicon (特集:MEMS/NEMS材料特性および信頼性評価)
- B25-075 Characterization of MEMS Materials : Micro-Nano Physics Underlying MEMS
- OS6(1)-2(OS06W0033) Measurement of the Fracture Toughness of Micrometer Scale Single Crystal Silicon by Tensile Test Method
- SIM-12 MOLECULAR DYNAMICS SIMULATIONS OF ADHESION PROPERTIES OF MONOLAYER LIQUID LUBRICANT FILMS(Simulations of Micro/Nano Scale Phenomena IV,Technical Program of Oral Presentations)
- SIM-09 MOLECULAR DYNAMICS SIMULATIONS OF UV PATTERNING OF MONOLAYER LIQUID LUBRICANT FILMS(Simulations of Micro/Nano Scale Phenomena III,Technical Program of Oral Presentations)