Saitoh Yuichi | Mitsubishi Materials Silicon Corporation

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Mitsubishi Materials Silicon Corporation | 論文

• Simulation of Light Scattering by a Particle on a Film-Coated Substrate Using Coupled-Dipole Method
• Light Scattering by Submicron Particles on Film-Coated Wafers
• A Study of Defect Formation Mechamism at Edges of Local Oxidation of Silicon Structure
• Metal Impurity Trapping Effect by Stress at Edges of Local Oxidation of Silicon Structure
• Stress-Enhanced Diffusion of Boron at the Interface of a Directly Bonded Silicon Wafer

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