KANEKO M. | Sony Research Center
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概要
Sony Research Center | 論文
- Improvement of Gate-Insulator/Silicon Interface Characteristics in Amorphous Silicon Thin Film Transistors
- Observation of Laser-Induced Melting of Silicon Film Followed by Amorphization
- Pulsed Laser-Induced Amorphization of Polycrystalline Silicon Film
- Measuring the Temperature of a Quartz Substrate during and after the Pulsed Laser-Induced Crystallization of a-Si:H
- In Situ Observation of Pulsed Laser Doping : Semiconductors and Semiconductor Devices