Realization of Low Dislocation GaN/Sapphire Wafers by 3-Step Metalorganic Vapor Phase Epitaxial Growth with Island Induced Dislocation Control
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概要
- 論文の詳細を見る
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2003-05-15
著者
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TANAKA Satoru
Research Institute for Electronic Science, Hokkaido University
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Fujikura Hajime
Advanced Research Center Hitachi Cable Ltd.
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IIZUKA Kazuyuki
Advanced Research Center, Hitachi Cable Ltd.
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Tanaka Satoru
Research Institute For Electronic Science Hokkaido University
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Iizuka Kazuyuki
Advanced Research Center Hitachi Cable Ltd.
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