Reduction of Stacking Fault Density during SiC Bulk Crystal Growth in the [112^^-0] Direction

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概要

• 論文の詳細を見る
• Japan Society of Applied Physicsの論文
• 2003-03-15

著者

• Ohtani Noboru

  Ultra-low-loss Power Device Technology Research Body (upr)

• Katsuno Masakazu

  Ultra-low-loss Power Device Technology Research Body (upr)

• Fujimoto Tatsuo

  Ultra-low-loss Power Device Technology Research Body (upr)

関連論文

• Reduction of Stacking Fault Density during SiC Bulk Crystal Growth in the [112^^-0] Direction
• Reduction of Stacking Fault Density during SiC Bulk Crystal Growth in the [$11\bar{2}0$] Direction

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