Technique for Determination of Nitrogen Concentration in Czochralski Silicon by Infrared Absorption Measurement

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概要

• 論文の詳細を見る
• Japan Society of Applied Physicsの論文
• 2003-03-01

著者

• Yamada-kaneta Hiroshi

  Nano-electronic Materials Research And Engineering Laboratory Fujitsu Laboratories Limited

• Tanahashi Katsuto

  Nano-electronic Materials Research And Engineering Laboratory Fujitsu Laboratories Limited

関連論文

• Technique for Determination of Nitrogen Concentration in Czochralski Silicon by Infrared Absorption Measurement
• Annealing Behavior of Interstitial Nitrogen Pair in Czochralski Silicon Observed by Infrared Absorption Method

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