Stable Molecules in N₂-H₂ Plasmas Measured Using a Quartz Sensor (Special Issue : Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials)
スポンサーリンク
概要
著者
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Suzuki Atsushi
Research And Development Center Riso Kagaku Corporation
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Asahina Shuichi
Hamada Branch, Shimane Institute for Industrial Technology, Hamada, Shimane 697-0006, Japan
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Suzuki Atsushi
Research Institute of Instrumentation Frontier, National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba, Ibaraki 305-8568, Japan
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