Stable Molecules in N

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概要

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• Stable molecules of N<inf>2</inf>, H<inf>2</inf>, and NH<inf>3</inf>in N<inf>2</inf>--H<inf>2</inf>plasmas were investigated using a quartz sensor (Q-sensor). Changes in the pressure- and temperature-normalized Q-sensor output (NQO) induced by plasma with radio-frequency (rf) input power were measured near plasma electrodes and shown to correlate to the relative ion signal intensity from NH<inf>3</inf>. The results confirm that gas composition changes in N<inf>2</inf>--H<inf>2</inf>plasmas can be successfully measured from the NQO changes using the Q-sensor. The spatial distribution of NQO indicates that NH<inf>3</inf>molecules are produced near plasma electrodes rather than by secondary gas reactions in the plasma, which also means that Q-sensor measurements can provide information regarding stable gas molecules in plasma.

• 2013-11-25

著者

• Suzuki Atsushi

  Research And Development Center Riso Kagaku Corporation

• Asahina Shuichi

  Hamada Branch, Shimane Institute for Industrial Technology, Hamada, Shimane 697-0006, Japan

• Suzuki Atsushi

  Research Institute of Instrumentation Frontier, National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba, Ibaraki 305-8568, Japan

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• Stable Molecules in N

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