Surface Treatment and Characterization of Indium-Tin-Oxide Thin Films Modified Using Cyclonic Atmospheric-Pressure Plasma (Special Issue : Dry Process)
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概要
- 論文の詳細を見る
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
著者
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Tsai Ching-Yuan
Department of Chemical Engineering and Materials Science, Yuan Ze Fuel Cell Center, Yuan Ze University, 135 Yuan-Tung Road, Chungli, Taiwan 32003, R.O.C.
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Huang Chun
Department of Chemical Engineering and Materials Science, Yuan Ze Fuel Cell Center, Yuan Ze University, 135 Yuan-Tung Road, Chungli, Taiwan 32003, R.O.C.
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- Surface Treatment and Characterization of Indium-Tin-Oxide Thin Films Modified Using Cyclonic Atmospheric-Pressure Plasma (Special Issue : Dry Process)