Low-Loss Amorphous Silicon Multilayer Waveguides Vertically Stacked on Silicon-on-Insulator Substrate
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概要
- 論文の詳細を見る
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
著者
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Kang Joonhyun
Tokyo Institute Of Technology
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ATSUMI Yuki
Tokyo Institute of Technology
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ODA Manabu
Tokyo Institute of Technology
関連論文
- Low-Loss Amorphous Silicon Multilayer Waveguides Vertically Stacked on Silicon-on-Insulator Substrate
- Athermal Wavelength Filters toward Optical Interconnection to LSIs
- Layer-to-Layer Grating Coupler Based on Hydrogenated Amorphous Silicon for Three-Dimensional Optical Circuits