Layer-to-Layer Grating Coupler Based on Hydrogenated Amorphous Silicon for Three-Dimensional Optical Circuits

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概要

• 論文の詳細を見る

著者

• Kang Joonhyun

  Tokyo Institute Of Technology

• ATSUMI Yuki

  Tokyo Institute of Technology

• ODA Manabu

  Tokyo Institute of Technology

関連論文

• Low-Loss Amorphous Silicon Multilayer Waveguides Vertically Stacked on Silicon-on-Insulator Substrate
• Athermal Wavelength Filters toward Optical Interconnection to LSIs
• Layer-to-Layer Grating Coupler Based on Hydrogenated Amorphous Silicon for Three-Dimensional Optical Circuits

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