Plasma Nitridation of Hydrogenated Silicon Nitride Film (Special Issue : Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials)

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概要

• 論文の詳細を見る
• Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文

著者

• Lin Chiung-Wei

  Graduate Institute of Electrical-Optical Engineering, Tatung University, Taipei 10452, Taiwan

• Yang Ming-Hsien

  Graduate Institute of Electrical-Optical Engineering, Tatung University, Taipei 10452, Taiwan

• Lee Yeong-Shyang

  R&D Center, Thin Film Photovoltaics, Dupont Apollo, 518107, Hong Kong

関連論文

• Plasma Nitridation of Hydrogenated Silicon Nitride Film (Special Issue : Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials)
• Less Reflective Sub-Wavelength Structure Formed on Textured Surface Using Nanosphere Mask

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