A highly sensitive inorganic resist for directly fabricating thermally stable oxide pattern on Si substrate by low-energy electron-beam direct writing (Special issue: Microprocesses and nanotechnology)
スポンサーリンク
概要
- 論文の詳細を見る
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
著者
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Matsuda Kazuhiro
Department Of Agronomy
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Kaneko Tadaaki
Department of Physics, School of Science and Technology, Kwansei Gakuin University, Sanda, Hyogo 669-1337, Japan
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Ushio Shoji
Department of Physics, School of Science and Technology, Kwansei Gakuin University, Sanda, Hyogo 669-1337, Japan
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Hirokawa Yuki
Department of Physics, School of Science and Technology, Kwansei Gakuin University, Sanda, Hyogo 669-1337, Japan
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Gotou Taiki
Department of Physics, School of Science and Technology, Kwansei Gakuin University, Sanda, Hyogo 669-1337, Japan
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