Hirokawa Yuki | Department of Physics, School of Science and Technology, Kwansei Gakuin University, Sanda, Hyogo 669-1337, Japan

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概要

関連著者

Matsuda Kazuhiro
Department Of Agronomy
Kaneko Tadaaki
Department of Physics, School of Science and Technology, Kwansei Gakuin University, Sanda, Hyogo 669-1337, Japan
Ushio Shoji
Department of Physics, School of Science and Technology, Kwansei Gakuin University, Sanda, Hyogo 669-1337, Japan
Hirokawa Yuki
Department of Physics, School of Science and Technology, Kwansei Gakuin University, Sanda, Hyogo 669-1337, Japan
Gotou Taiki
Department of Physics, School of Science and Technology, Kwansei Gakuin University, Sanda, Hyogo 669-1337, Japan

著作論文

A highly sensitive inorganic resist for directly fabricating thermally stable oxide pattern on Si substrate by low-energy electron-beam direct writing (Special issue: Microprocesses and nanotechnology)

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