Interaction of bis-diethylaminosilane with a hydroxylized Si(001) surface for SiO2 thin-film growth using density functional theory (Electron devices)
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概要
- 論文の詳細を見る
- 2010-06-30
著者
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Baek Seung-bin
Department Of Materials Engineering Korea University Of Technology And Education
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Kim Dae-hee
Department Of Materials Engineering Korea University Of Technology And Education
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Yoo Yong-min
Department Of Materials Engineering Korea University Of Technology And Education
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Kim Yeong-Cheol
Department of Materials Engineering, Korea University of Technology and Education
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