Investigation of Application Availability of UV-NIL by Using Several Types of Photo-curable Resin

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概要

• 論文の詳細を見る
• Technical Association of Photopolymers, Japanの論文

著者

• Sakai Nobuji

  Toyo Gosei Co. Ltd Chiba Jpn

• Taniguchi Jun

  Tokyo Univ. Sci. Chiba Jpn

関連論文

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• Investigation of Application Availability of UV-NIL by Using Several Types of Photo-curable Resin
• Enhanced Durability of Antisticking Layers by Recoating a Silica Surface with Fluorinated Alkylsilane Derivatives by Chemical Vapor Surface Modification
• Fluorescent UV-Curable Resists for UV Nanoimprint Lithography
• Quantum Molecular Dynamics Study on Energy Transfer to the Secondary Electron in Surface Collision Process of an Ion

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