Cu Dispersed C-S Dielectric Thin Film

スポンサーリンク

概要

• 論文の詳細を見る
• Technical Association of Photopolymers, Japanの論文

著者

• Kato Shinya

  Nagoya Univ.

• Morita Shinzo

  Nagoya Univ.

関連論文

• Electron-Beam Assisted Inductively Coupled Plasma for Quarter-Micron Etching Processes (特集:11th International Conference on Gas Discharges and their Applications)
• Synchrotron-Radiation-Induced Deposition of Etch-Protecting Film on Si in CF_4 Plasma
• Cu Dispersed C-S Dielectric Thin Film

スポンサーリンク