Analysis of Substrate Effect in Chemically Amplified Resist

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概要

• 論文の詳細を見る
• Technical Association of Photopolymers, Japanの論文

著者

• Fukushima T

  Yokohama National Univ. Yokohama Jpn

• Matsuura Y

  Osaka Municipal Technical Res. Inst. Osaka Jpn

関連論文

• Analysis of Substrate Effect in Chemically Amplified Resist
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• Preparation of Porous Titania Thin Films from Polysilane-Titania Hybrid by UV Irradiation

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