Matsuura Y | Osaka Municipal Technical Res. Inst. Osaka Jpn
スポンサーリンク
概要
関連著者
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Matsuura Y
Osaka Municipal Technical Res. Inst. Osaka Jpn
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MATSUKAWA Kimihiro
Osaka Municipal Technical Research Institute
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Matsukawa K
Osaka Municipal Technical Research Institute
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Naito H
Univ. Osaka Prefecture Osaka
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内藤 裕義
大阪府立大学工学部電子物理工学科
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Naito H
College Of Engineering Osaka Prefecture University
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Naito H
Osaka Prefecture Univ. Osaka Jpn
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Fukushima T
Yokohama National Univ. Yokohama Jpn
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内藤 裕義
大阪府立大学大学院 工学研究科 電子・数物系専攻
著作論文
- Analysis of Substrate Effect in Chemically Amplified Resist
- Acryl Polymer-Silica Hybrid for Electron Beam Resist
- Organic-Inorganic Hybrid Type Electron Beam Resist
- Synthesis of Polysilane-Acrylic Copolymers by Photopolymerization and Their Application to Positive Resists for EB Lithography
- Preparation of Porous Titania Thin Films from Polysilane-Titania Hybrid by UV Irradiation