Localized Electroless Ag Plating at a Tip Apex for Scanning Kelvin Probe Microscopy

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概要

• 論文の詳細を見る

• A typical probe for scanning Kelvin probe microscopy (SKPM) consists of an atomic force microscopy (AFM) probe with a metallic coating. Such probes result in a large sensing area and lead to poor spatial resolution due to the stray-field effect. With electroless Ag plating (EAP), we employed an AFM system to form a Ag nanodot (AND) at the apex of the probe tip, which reduces the sensing area of the SKPM probe, thereby suppressing the stray-field effect. It was revealed that the tip with an AND structure had improved the spatial resolution in SKPM. Our experimental results showed that the EAP process can be completed in a few seconds, implying that localized EAP is a simple and rapid process for preparing an AND structure at the tip apex in SKPM measurements.

• 2013-06-25

著者

• Shiao Ming-hua

  Instrument Technology Research Center National Applied Research Laboratories

• Lin Chun-Ting

  Instrument Technology Research Center, National Applied Research Laboratories, Hsinchu 300, Taiwan

• Yu Ming-Han

  Institute of Nanoscience, National Chung Hsing University, Taichung 402, Taiwan

• Su James

  Instrument Technology Research Center, National Applied Research Laboratories, Hsinchu 300, Taiwan

• Chen Po-Li

  Instrument Technology Research Center, National Applied Research Laboratories, Hsinchu 300, Taiwan

• Nemcsics Akos

  Institute for Microelectronics and Technology, Obuda University, H-1084 Budapest, Hungary

• Chang Mao-Nan

  Institute of Nanoscience, National Chung Hsing University, Taichung 402, Taiwan

関連論文

• Effects of Ion Assistance and Substrate Temperature on Optical Characteristics and Microstructure of MgF_2 Films Formed by Electron-Beam Evaporation
• Fabrication of Nanocone Subwavelength Antireflection Structures on Quartz Substrates
• Localized Electroless Ag Plating at a Tip Apex for Scanning Kelvin Probe Microscopy
• Localized Electroless Ag Plating at a Tip Apex for Scanning Kelvin Probe Microscopy (Special Issue : Microprocesses and Nanotechnology)

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