Inclined Dislocation Generation in Compressive-Strain-Enhanced Mg-Doped GaN/Al
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概要
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The \mbi{a}- and \mbi{a}+\mbi{c}-type threading dislocation (TD) inclinations were observed in Mg-doped tensile-strained GaN/Al<inf>0.15</inf>Ga<inf>0.85</inf>N superlattice (SL) with a high-temperature (HT) AlN interlayer (IL). Most of the inclined dislocations are \mbi{a}-type, toward the equivalent [1\bar{1}00] line direction, following dislocation climb model, while \mbi{a}+\mbi{c}-type dislocations gliding on (1\bar{1}01) second slip plane inclined toward the [11\bar{2}0] line direction. The analysis by comparing samples gave no evidence of Mg dopants to affect the TD inclination. The stress evolution, specifically, the stress transformation of the tensile-stress-relieved AlGaN barrier to the compressive-strain-enhanced GaN well caused by the HT-AlN IL, dominantly affected the \mbi{a}- and \mbi{a}+\mbi{c}-type TD inclinations.
- 2013-06-25
著者
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Wei Qiyuan
Department Of Physics Arizona State University
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Li Ding
State Key Laboratory For Artificial Microstructure And Mesoscopic Physics School Of Physics Peking University
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ZHANG Guoyi
State Key Laboratory for Artificial Microstructure and Mesoscopic Physics, School of Physics, Peking University
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Li Lei
State Key Laboratory For Artificial Microstructure And Mesoscopic Physics School Of Physics Peking University
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Hu Xiaodong
State Key Laboratory For Artificial Microstructure And Mesoscopic Physics School Of Physics Peking University
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Yang Zhijian
State Key Laboratory For Artificial Microstructure And Mesoscopic Physics School Of Physics Peking University
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Chen Weihua
State Key Laboratory For Artificial Microstructure And Mesoscopic Physics School Of Physics Peking University
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Chen Weihua
State Key Laboratory for Artificial Microstructure and Mesoscopic Physics, School of Physics, Peking University, Beijing 100871, China
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Yang Zhijian
State Key Laboratory for Artificial Microstructure and Mesoscopic Physics, School of Physics, Peking University, Beijing 100871, China
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Wu Jiejun
State Key Laboratory for Artificial Microstructure and Mesoscopic Physics, School of Physics, Peking University, Beijing 100871, China
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Wei Qiyuan
Department of Physics, Arizona State University, Tempe, AZ 85287, U.S.A.
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Zhang Guoyi
State Key Laboratory for Artificial Microstructure and Mesoscopic Physics, School of Physics, Peking University, Beijing 100871, China
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WU Jiejun
State Key Laboratory for Artificial Microstructure and Mesoscopic Physics, School of Physics, Peking University
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