Electron Collision Cross Sections for the BF
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概要
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A consistent set of low-energy electron collision cross sections for the boron trifluoride (BF<inf>3</inf>) molecule has been derived from the measured electron transport coefficients for a pure BF<inf>3</inf>molecule using an electron swarm study and a two-term approximation of the Boltzmann equation for energy. The electron transport coefficients, which were calculated using the derived set, are consistent with the experimental data over a wide range of E/N values (ratio of the electric field E to the neutral number density N). The present set of electron collision cross sections for the BF<inf>3</inf>molecule, therefore, is the best available so far for the quantitative numerical modeling of plasma discharges for processing procedures with materials containing BF<inf>3</inf>molecules. The electron-transport coefficients for BF<inf>3</inf>--Ar and BF<inf>3</inf>--SiH<inf>4</inf>mixtures were also calculated and analyzed in a wide range of E/N ratios for the first time. The presence of a remarkable synergism in the Townsend first ionization coefficient has been pointed out in BF<inf>3</inf>--SiH<inf>4</inf>mixtures.
- 2013-03-15
著者
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Jeon Byung-Hoon
Division of Electronics and Electrical Engineering, Dongguk University, Seoul 100-715, Republic of Korea
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Hien Pham
Division of Electronics and Electrical Engineering, Dongguk University, Seoul 100-715, Republic of Korea
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Tuan Do
Faculty of Electronics and Electrical Engineering, Hung Yen University of Technology and Education, Khoai Chau, Hung Yen, Vietnam
関連論文
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- Electron Collision Cross Sections for the BF