Electron Collision Cross Sections for the Cl2 Molecule from Electron Transport Coefficients
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概要
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The measured electron transport coefficients (electron drift velocity, Townsend first ionization coefficient, electron attachment coefficient, and density-normalized effective ionization coefficient) in pure Cl2 have been analyzed to derive the currently best available electron collision cross section set of the elastic and inelastic electron collision cross sections for the Cl2 molecule using an electron swarm study and a two-term approximation of the Boltzmann equation for energy. The electron transport coefficients calculated using the derived cross sections are consistent with the experimental data over a wide range of E/N values (ratio of the electric field E to the neutral number density N). The present electron collision cross section set for the Cl2 molecule is the best available so far for quantitative numerical modeling plasma discharges for processing procedures with materials containing Cl2 molecules.
- 2011-08-15
著者
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Tuan Do
Division of Electronics and Electrical Engineering, Dongguk University, Seoul 100-715, Republic of Korea
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Tuan Do
Division of Electronics Electrical Engineering, Dongguk University, Seoul 100-715, Republic of Korea
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Jeon Byung-Hoon
Division of Electronics and Electrical Engineering, Dongguk University, Seoul 100-715, Republic of Korea
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Jeon Byung-Hoon
Division of Electronics Electrical Engineering, Dongguk University, Seoul 100-715, Republic of Korea
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