Study on Optoelectronic Characteristics of Sn-Doped ZnO Thin Films on Poly(ethylene terephthalate) and Indium Tin Oxide/Poly(ethylene terephthalate) Flexible Substrates

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概要

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• Transparent conductive oxides of Sn-doped ZnO (SZO) films with doping weight ratios of 2.0, 3.0, 4.0, and 5.0 wt % have been deposited on indium tin oxide (ITO)/poly(ethylene terephthalate) (PET) and PET flexible substrates at room temperature by pulsed laser deposition (PLD). Resultant films of SZO on ITO/PET and PET flexible substrates are amorphous in phase. It is found that undoped and SZO films on ITO/PET is anomalously better than films on PET in optical transmittance in the range of longer wavelength, possibly due to the refraction index difference between SZO, ITO films, and PET substrates, Burstein--Moss effect and optical interference of SZO/ITO bilayer films and substrate materials, and furthermore resulting in the decrement of reflection. The lowest electrical resistivity (\rho) of 4.0 wt % SZO films on flexible substrates of PET and ITO/PET are 3.8\times 10^{-2} and \rho = 1.2\times 10^{-2} \Omega\cdotcm, respectively. It is found that electrical and optical properties of the resultant films are greatly dependent on various amount of Sn element doping effect and substrate material characteristics.

• 2013-05-25

著者

• Chen Mi

  Department Of Materials Science And Engineering National Chiao-tung University

• Weng Lin-Song

  Institute of Electronic Engineering and Department of Electronic Engineering, Minghsin University of Science and Technology, Xinfeng, Hsinchu 30401, Taiwan

• Cheng Chi-Hwa

  Institute of Electronic Engineering and Department of Electronic Engineering, Minghsin University of Science and Technology, Xinfeng, Hsinchu 30401, Taiwan

• Chiou Chin-Lung

  Institute of Electronic Engineering and Department of Electronic Engineering, Minghsin University of Science and Technology, Xinfeng, Hsinchu 30401, Taiwan

• Liu Xing-Yang

  Institute of Electronic Engineering and Department of Electronic Engineering, Minghsin University of Science and Technology, Xinfeng, Hsinchu 30401, Taiwan

• Koo Horng-Show

  Institute of Electronic Engineering and Department of Electronic Engineering, Minghsin University of Science and Technology, Xinfeng, Hsinchu 30401, Taiwan

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